MEMS

Software In Action		View
	Mechanical Event Simulation of Micropump A collaborative project with the University of Alberta examined the effects of resonance on a piezoelectric micropump. Firstly, linear dynamic analysis determined the natural frequencies. Then, stress levels were obtained by resonating the micropump at its first natural frequency using Mechanical Event Simulation.	56K   100K 250K
	Mechanical Event Simulation of MEMS Optical Switch Engineers at SiWave, Inc. examined the dynamic response of this MEMS optical switch using Mechanical Event Simulation. The simulation was performed to assure that the device would be in compliance with Telcordia shock loading standards.	56K   100K 250K
	Multiphysics Analysis of MEMS Micro-Heater In this Multiphysics analysis of a MEMS micro-heater, a heat transfer analysis was used to determine the temperature profile. This profile was then applied to a linear static stress analysis to determine the thermal stresses.	56K   100K 250K
	Mode Shapes of Stacked-Beam MEMS Switch The natural frequencies and mode shapes of this stacked-beam MEMS switch were determined so that resonance could be avoided in the design.	56K   100K 250K
	Multiphysics Analysis of MEMS Switch Forces generated by an electrostatic field were coupled to a static stress analysis with linear material models to determine the displacements that result for this MEMS switch.	56K   100K 250K
	Mechanical Event Simulation of MEMS Accelerometer This MEMS accelerometer for an automotive airbag was subjected to a 40g deceleration to determine its deflection and stresses during impact. The deflection results in a change in capacitance which triggers the signal to deploy the airbag.	56K   100K 250K
	Analysis of MEMS Radial Comb Motor Static stress with linear materials and electrostatic software were used to calculate the stresses which result from the electrostatic forces generated when voltage is applied to this MEMS radial comb motor.	56K   100K 250K
	Coupled Electrostatic and Static Stress Analysis of MEMS Comb Motor The forces generated from the electrostatic field were coupled to a static stress analysis to determine the displacements and stresses for this MEMS comb motor.	56K   100K 250K